Name: SFAH-0.5B-Q4S-PNLK-PNVBA-M8 Festo Flow sensor - INOSAKI
SKU: Festo-8158412
Price: 285.74 USD
Availability: InStock

Technical Overview

The Festo SFAH-0.5B-Q4S-PNLK-PNVBA-M8 is a high-precision bidirectional flow sensor designed for monitoring compressed air and nitrogen. Utilizing a thermal heat-transfer measuring principle, it supports a flow range from 0.01 to 0.5 l/min with exceptional accuracy and repetition. The device offers versatile output options including dual switchable PNP/NPN outputs and multiple analog signals (0-10V, 4-20mA, 1-5V). Integrated IO-Link V1.1 communication provides advanced diagnostics, parameterization, and smart sensor profile functionality, all housed in a robust PA-reinforced casing with an illuminated multi-color LCD display.

Key Features

Bidirectional flow direction sensing
Thermal measurement principle using heat transfer method
Switchable 2 x PNP or 2 x NPN switching outputs
Configurable analogue outputs: 0-10 V, 4-20 mA, 1-5 V
IO-Link® communication protocol version 1.1
Illuminated multi-colour LCD display for visual process monitoring
Straight pneumatic connection for 4 mm tubing O.D.
Short circuit and overload protection
RoHS-compliant materials
Cleanroom suitability class 4 according to ISO 14644-1

Technical Specification Matrix

Parameter	Value
Symbol	00995794
Approval	RCM trademark c UL us listed (OL)
CE mark	To EU EMC Directive In accordance with EU RoHS Directive
UKCA marking	To UK RoHS instructions
Certificate issuing authority	UL E322346
Note on materials	RoHS-compliant
Measured variable	Mass flow rate Volumetric flow rate
Flow direction	Bidirectional
Measuring principle	Thermal
Measurement method	Heat transfer
Start value for flow rate measuring range	0.01 l/min
End value for flow rate measuring range	0.5 l/min
Operating pressure	-0.9 bar ... 10 bar
Operating medium	Compressed air to ISO 8573-1:2010 [6:4:4] Nitrogen
Media temperature	0 °C ... 50 °C
Ambient temperature	0 °C ... 50 °C
Nominal temperature	23 °C
Accuracy of flow rate	± (2% o.m.v. + 1% FS)
Repetition accuracy offset in ± %FS	0.2 %FS
Repetition accuracy span in ± %FS	0.8 %FS
Temperature coefficient span in ± %FS/K	Typ. 0.15%FS/K
Pressure influence span in ± %FS/bar	1 %FS/b.
Switching output	2 x PNP or 2 x NPN, switchable
Switching function	Window comparator Threshold value comparator Auto difference monitoring
Switching element function	N/C or N/O contact, switchable
Max. output current	100 mA
Analogue output	0 - 10 V 4 - 20 mA 1 - 5 V
Flow characteristic curve start value	-0.5 l/min
Flow characteristic curve end value	0.5 l/min
Max. load resistance current output	500 Ohm
Min. load resistance voltage output	20 kOhm
Short circuit current rating	yes
Overload protection	Available
Protocol	IO-Link®
IO-Link, Protocol version	Device V 1.1
IO-Link, Profile	Smart sensor profile
IO-Link, Function classes	Binary data channel (BDC) Process data variable (PDV) Identification Diagnostics Teach channel
IO-Link, communication mode	COM2 (38.4 kBaud)
IO-Link, SIO-Mode support	Yes
IO-Link, Port class	A
IO-Link, Process data length IN	3 bytes
IO-Link, Process data content IN	1 bit BDC (volume monitoring) 14 bit PDV (measured flow value) 2 bit BDC (flow monitoring)
IO-Link, Service data IN	32-bit volume/mass measurement
IO-Link, Min. cycle time	4 ms
IO-Link, Data storage required	<500 Byte
Operational voltage range DC	22 V ... 26 V
No-load supply current	≤25 mA
Reverse polarity protection	For all electrical connections
Electrical connection 1, connection type	Plugs
Electrical connection 1, connector system	M8x1, A-coded, to EN 61076-2-104
Electrical connection 1, number of connections/cores	4
Electrical connection 1, type of mounting	Not rotatable
Electrical connection 1, compatible type of mounting	Compatible with latching lock Compatible with rotatable screw-type lock
Electrical connection 1, connection pattern	00991171
Type of mounting	With accessories
Mounting position	optional
Pneumatic connection	For tubing O.D. 4 mm
Pneumatic connection, outlet direction	Straight
Product weight	60 g
Material housing	PA-reinforced
Material in contact with the medium	Silicon Silicon nitride High-alloy stainless steel
Display type	Illuminated LCD, multi-colour
Displayable units	g g/min l l/h l/min scft scft/h
Setting options	IO-Link® Teach-in Via display and keys
Protection against tampering	IO-Link PIN code
Degree of protection	IP40
Pressure drop	<5 mbar
Protection class	III
Corrosion resistance class CRC	2 - Moderate corrosion stress
LABS (PWIS) conformity	VDMA24364-B2-L
Cleanroom suitability	Class 4 according to ISO 14644-1
Pollution degree	3

Industrial Applications

1. Micro-Leak Detection in Semiconductor Wafer Processing

Utilizing the Festo SFAH flow sensor to detect microscopic leaks in semiconductor vacuum chambers and handling equipment. The sensor monitors minimal volumetric flow rates of Nitrogen during system pressurization tests, ensuring environmental integrity for delicate silicon wafers.

Problem Solved

Standard pressure decay tests are often too slow or insensitive for micro-leaks. By directly measuring extremely low flow rates down to 0.01 l/min in a Cleanroom Class 4 (ISO 14644-1) environment, operators can instantly identify seal degradation or faulty valves via IO-Link, preventing costly contamination and yield loss.

0.01 to 0.5 l/min flow rangeCleanroom Class 4Nitrogen compatibilityThermal heat transferIO-Link diagnostics

2. Precision Gas Metering in Analytical Laboratory Equipment

Integrating the bidirectional flow sensor into gas chromatography or environmental monitoring devices to regulate the exact amount of compressed air or nitrogen carrier gases. The sensor outputs real-time 14-bit process data via IO-Link for precise gas blending and monitoring.

Problem Solved

Analytical instruments require highly stable, precise gas dosing without flow restriction to maintain measurement accuracy. The SFAH provides high precision with an accuracy of ±(2% o.m.v. + 1% FS) and an ultra-low pressure drop of <5 mbar, ensuring that the sensor does not disrupt delicate gas mechanics while delivering precise analogue or digital feedback to controllers.

Bidirectional flow<5 mbar pressure drop14-bit PDV IO-Link4 - 20 mA analogue output±(2% o.m.v. + 1% FS) accuracy

3. Vacuum Pick-and-Place Verification for Microelectronics

Employing the flow sensor on robotic end-effectors used in surface mount technology (SMT) or microchip assembly. The SFAH monitors the flow rate under vacuum to verify whether a miniature component has been successfully picked up by the suction nozzle.

Problem Solved

Traditional vacuum switches struggle with the extremely small pressure differentials caused by missing micro-components. The SFAH operates down to -0.9 bar operating pressure and uses a threshold value comparator to detect the sudden increase in mass flow (within the 0.5 l/min range) when a nozzle is empty, using its fast 4 ms IO-Link cycle time to instantly halt the machine and prevent assembly errors.

-0.9 bar to 10 bar operating pressureThreshold value comparator4 ms IO-Link cycle timeMass flow rateO.D. 4 mm pneumatic connection