Name: SFAH-0.1U-Q4S-PNLK-PNVBA-L1 Festo Flow sensor - INOSAKI
SKU: Festo-8058461
Price: 265.72 USD
Availability: InStock

Technical Overview

The Festo SFAH-0.1U-Q4S-PNLK-PNVBA-L1 is a high-precision thermal flow sensor designed for measuring mass and volumetric flow rates of compressed air and nitrogen. Utilizing a thermal heat transfer measurement method, it provides unidirectional monitoring with a flow range up to 0.1 l/min. The device features an illuminated multi-colour LCD for local visualization and integrates IO-Link technology for advanced diagnostics, parameterization, and data transmission. It offers switchable electrical outputs (PNP/NPN) and multiple analogue output options (0-10 V, 1-5 V, and 4-20 mA), making it highly versatile for automation applications requiring precise flow control in compact spaces.

Key Features

Thermal measuring principle based on heat transfer
Switchable digital outputs (2 x PNP or 2 x NPN)
Multi-configurable analogue outputs (0-10 V, 4-20 mA, 1-5 V)
Illuminated multi-colour LCD display for visual status monitoring
IO-Link communication for digital integration and remote parameterization
Cleanroom suitability according to ISO 14644-1 Class 4
Compact PA-reinforced housing with IP40 protection
Selectable display units including l/min, scft/h, and g/min

Technical Specification Matrix

Parameter	Value
Symbol	00995795
Approval	RCM trademark c UL us listed (OL)
CE mark	To EU EMC Directive In accordance with EU RoHS Directive
UKCA marking	To UK RoHS instructions
Certificate issuing authority	UL E322346
Note on materials	RoHS-compliant
Measured variable	Mass flow rate Volumetric flow rate
Flow direction	Unidirectional
Measuring principle	Thermal
Measurement method	Heat transfer
Start value for flow rate measuring range	0.002 l/min
End value for flow rate measuring range	0.1 l/min
Operating pressure	-0.9 bar ... 10 bar
Operating medium	Compressed air to ISO 8573-1:2010 [6:4:4] Nitrogen
Media temperature	0 °C ... 50 °C
Ambient temperature	0 °C ... 50 °C
Nominal temperature	23 °C
Accuracy of flow rate	± (2% o.m.v. + 1% FS)
Repetition accuracy offset in ± %FS	0.2 %FS
Repetition accuracy span in ± %FS	0.8 %FS
Temperature coefficient span in ± %FS/K	Typ. 0.15%FS/K
Pressure influence span in ± %FS/bar	1 %FS/b.
Switching output	2 x PNP or 2 x NPN, switchable
Switching function	Window comparator Threshold value comparator Auto difference monitoring
Switching element function	N/C or N/O contact, switchable
Max. output current	100 mA
Analogue output	0 - 10 V 4 - 20 mA 1 - 5 V
Flow characteristic curve start value	0 l/min
Flow characteristic curve end value	0.1 l/min
Max. load resistance current output	500 Ohm
Min. load resistance voltage output	20 kOhm
Short circuit current rating	yes
Overload protection	Available
Protocol	IO-Link®
IO-Link, Protocol version	Device V 1.1
IO-Link, Profile	Smart sensor profile
IO-Link, Function classes	Binary data channel (BDC) Process data variable (PDV) Identification Diagnostics Teach channel
IO-Link, communication mode	COM2 (38.4 kBaud)
IO-Link, SIO-Mode support	Yes
IO-Link, Port class	A
IO-Link, Process data length IN	3 bytes
IO-Link, Process data content IN	1 bit BDC (volume monitoring) 14 bit PDV (measured flow value) 2 bit BDC (flow monitoring)
IO-Link, Service data IN	32-bit volume/mass measurement
IO-Link, Min. cycle time	4 ms
IO-Link, Data storage required	<500 Byte
Operational voltage range	DC 22 V ... 26 V
No-load supply current	≤25 mA
Reverse polarity protection	For all electrical connections
Electrical connection 1, connection type	Plugs
Electrical connection 1, connector system	Connection pattern L1J
Electrical connection 1, number of connections/cores	4
Electrical connection 1, connection pattern	00995428
Type of mounting	With accessories
Mounting position	optional
Pneumatic connection	For tubing O.D. 4 mm
Pneumatic connection, outlet direction	Straight
Product weight	60 g
Material housing	PA-reinforced
Material in contact with the medium	Silicon Silicon nitride High-alloy stainless steel
Display type	Illuminated LCD, multi-colour
Displayable units	g g/min l l/h l/min scft scft/h
Setting options	IO-Link® Teach-in Via display and keys
Protection against tampering	IO-Link PIN code
Degree of protection	IP40
Pressure drop	<5 mbar
Protection class	III
Corrosion resistance class CRC	2 - Moderate corrosion stress
LABS (PWIS) conformity	VDMA24364-B2-L
Cleanroom suitability	Class 4 according to ISO 14644-1
Pollution degree	3

Industrial Applications

1. Micro-Component Vacuum Gripping Verification in Semiconductor Manufacturing

Using the Festo SFAH flow sensor to monitor the exact volume of air bypassing a vacuum suction cup during the pick-and-place of microchips. Due to its Class 4 cleanroom suitability and -0.9 bar operating pressure compatibility, it can precisely detect micro-leaks in the vacuum system that indicate a dropped, defective, or misaligned chip.

Problem Solved

Standard pressure sensors often fail to detect tiny physical misalignments on micro-grippers. Measuring the ultra-low volumetric flow (between 0.002 and 0.1 l/min) using thermal heat transfer ensures exact component seating without introducing contamination in the semiconductor cleanroom.

-0.9 bar operating pressure0.002 l/min start valueCleanroom Class 4 ISO 14644-1IO-Link process data variableThermal heat transfer

2. Nitrogen Blanketing for Microfluidic Device Assembly

Integrating the SFAH sensor into miniature nitrogen purging stations for medical device manufacturing. The sensor continuously tracks mass flow rates using its IO-Link connection to ensure an ultra-low, precise nitrogen blanket is maintained over sensitive lab-on-a-chip assemblies without causing turbulence.

Problem Solved

Excessive nitrogen flow wastes expensive gas and can physically disrupt sensitive micro-components, while insufficient flow risks oxidation. The sensor provides continuous monitoring using its window comparator switching function strictly within the 0 to 0.1 l/min range to maintain the perfect manufacturing atmosphere.

Nitrogen operating medium0.1 l/min max flow rateWindow comparatorIO-Link Smart sensor profileMass flow rate

3. Automated Micro-Leak Detection in Sealed Electronics

Employing the highly sensitive flow measurement of the Festo SFAH to perform precision leak testing on sealed electronics enclosures. By applying low-pressure compressed air and measuring the stabilizing flow rate, the sensor uses its illuminated multi-color LCD to visually indicate pass/fail states while communicating with the PLC via 4-20mA or IO-Link.

Problem Solved

Detecting minute leaks in small-volume electronics requires sensing nearly imperceptible air movement. The SFAH sensor solves this with its ultra-sensitive 0.002 l/min start value, +/- 2% accuracy, and fast 4 ms IO-Link cycle time, allowing for rapid and automated identification of microscopic seal failures on the production line.

0.002 l/min flow rate4 ms IO-Link cycle timeCompressed air ISO 8573-1:2010Illuminated LCD multi-colourAnalogue output 4 - 20 mA