SFAH-0.1U-G18FS-PNLK-PNVBA-M8 Festo Flow sensor

USD 285.74

High-precision thermal flow sensor with a 0.002 to 0.1 l/min measuring range and G1/8 female thread. Features IO-Link® communication, PNP/NPN switching, and an illuminated multi-colour LCD.

SKU Festo-8158411 Category
Flow sensors

SFAH-0.1U-G18FS-PNLK-PNVBA-M8 Festo Flow sensor

Model Identifier SFAH-0.1U-G18FS-PNLK-PNVBA-M8
Official Part Number 8158411
GTIN Standard 4052568583842

Technical Overview

The Festo SFAH-0.1U-G18FS-PNLK-PNVBA-M8 is a high-precision thermal flow sensor specifically designed for monitoring compressed air and nitrogen. Utilizing a heat transfer measurement method, it provides unidirectional flow monitoring with a range of 0.002 to 0.1 l/min. The sensor is equipped with an illuminated multi-color LCD for easy status monitoring and supports IO-Link version 1.1 for seamless automation integration. It features versatile output options including switchable PNP/NPN and various analog signals (0-10 V, 4-20 mA, 1-5 V), housed in a durable PA-reinforced body.

Key Features

  • Unidirectional flow measurement direction
  • Thermal measuring principle via heat transfer
  • IO-Link Communication Protocol V 1.1 with Smart sensor profile
  • Illuminated multi-colour LCD display
  • Switchable PNP or NPN switching outputs
  • Configurable analogue outputs (0-10 V, 4-20 mA, 1-5 V)
  • Cleanroom suitability Class 4 according to ISO 14644-1
  • Protection against tampering via IO-Link PIN code

Thermal measuring principle with heat transfer for high-precision flow monitoring of compressed air and nitrogen with integrated IO-Link communication.

Technical Specification Matrix

ParameterValue
Symbol00995794
ApprovalRCM trademark c UL us listed (OL)
CE mark (see declaration of conformity)To EU EMC Directive In accordance with EU RoHS Directive
UKCA marking (see declaration of conformity)To UK RoHS instructions
Certificate issuing authorityUL E322346
Note on materialsRoHS-compliant
Measured variableMass flow rate Volumetric flow rate
Flow directionUnidirectional
Measuring principleThermal
Measurement methodHeat transfer
Start value for flow rate measuring range0.002 l/min
End value for flow rate measuring range0.1 l/min
Operating pressure-0.9 bar ... 10 bar
Operating mediumCompressed air to ISO 8573-1:2010 [6:4:4] Nitrogen
Media temperature0 °C ... 50 °C
Ambient temperature0 °C ... 50 °C
Nominal temperature23 °C
Accuracy of flow rate± (2% o.m.v. + 1% FS)
Repetition accuracy offset in ± %FS0.2 %FS
Repetition accuracy span in ± %FS0.8 %FS
Temperature coefficient span in ± %FS/KTyp. 0.15%FS/K
Pressure influence span in ± %FS/bar1 %FS/b.
Switching output2 x PNP or 2 x NPN, switchable
Switching functionWindow comparator Threshold value comparator Auto difference monitoring
Switching element functionN/C or N/O contact, switchable
Max. output current100 mA
Analogue output0 - 10 V 4 - 20 mA 1 - 5 V
Flow characteristic curve start value0 l/min
Flow characteristic curve end value0.1 l/min
Max. load resistance current output500 Ohm
Min. load resistance voltage output20 kOhm
Short circuit current ratingyes
Overload protectionAvailable
ProtocolIO-Link®
IO-Link, Protocol versionDevice V 1.1
IO-Link, ProfileSmart sensor profile
IO-Link, Function classesBinary data channel (BDC) Process data variable (PDV) Identification Diagnostics Teach channel
IO-Link, communication modeCOM2 (38.4 kBaud)
IO-Link, SIO-Mode supportYes
IO-Link, Port classA
IO-Link, Process data length IN3 bytes
IO-Link, Process data content IN1 bit BDC (volume monitoring) 14 bit PDV (measured flow value) 2 bit BDC (flow monitoring)
IO-Link, Service data IN32-bit volume/mass measurement
IO-Link, Min. cycle time4 ms
IO-Link, Data storage required<500 Byte
Operational voltage range DC22 V ... 26 V
No-load supply current≤25 mA
Reverse polarity protectionFor all electrical connections
Electrical connection 1, connection typePlugs
Electrical connection 1, connector systemM8x1, A-coded, to EN 61076-2-104
Electrical connection 1, number of connections/cores4
Electrical connection 1, type of mountingNot rotatable
Electrical connection 1, compatible type of mountingCompatible with latching lock Compatible with rotatable screw-type lock
Electrical connection 1, connection pattern00991171
Type of mountingWith accessories
Mounting positionoptional
Pneumatic connectionFemale thread G1/8
Pneumatic connection, outlet directionStraight
Product weight90 g
Material housingPA-reinforced
Material in contact with the mediumSilicon Silicon nitride High-alloy stainless steel
Display typeIlluminated LCD, multi-colour
Displayable unitsg g/min l l/h l/min scft scft/h
Setting optionsIO-Link® Teach-in Via display and keys
Protection against tamperingIO-Link PIN code
Degree of protectionIP40
Pressure drop<5 mbar
Protection classIII
Corrosion resistance class CRC2 - Moderate corrosion stress
LABS (PWIS) conformityVDMA24364-B2-L
Cleanroom suitabilityClass 4 according to ISO 14644-1
Pollution degree3

Industrial Applications

1. Semiconductor Wafer Vacuum Gripper Monitoring

Utilizing the sensor to monitor the micro-flow of vacuum circuits in automated wafer handling and placement systems within semiconductor manufacturing environments.

Problem Solved

Detects misaligned microscopic components or silicon wafers on vacuum grippers by measuring minute flow changes (micro-leaks) as low as 0.002 l/min. This prevents dropped components and identifies poor suction seating while strictly adhering to ISO 14644-1 Class 4 cleanroom standards.

Cleanroom Class 4Vacuum (-0.9 bar)0.002 l/min Start ValueIO-Link Smart SensorSemiconductor Manufacturing

2. Precision Nitrogen Blanketing for Medical Vials

Controlling and validating the ultra-low flow of Nitrogen gas into miniature pharmaceutical vials or blister packs during the sealing process to safely displace oxygen.

Problem Solved

Eliminates oxidation in micro-volume medical packaging by verifying extremely small Nitrogen mass flow rates (up to 0.1 l/min). It uses IO-Link's 32-bit volume measurement and binary data channels to confirm the exact dosage of gas per vial without wasting costly high-purity Nitrogen.

Nitrogen Operating Medium0.1 l/min End ValueMass Flow RateVolume Monitoring (IO-Link BDC)Thermal Measuring Principle

3. Automated Micro-Leakage Testing for Precision Valves

End-of-line quality control test bench for micro-valves, medical devices, and precision pneumatic actuators to detect tiny internal or external leaks using thermal heat transfer.

Problem Solved

Automates the pass/fail inspection of precision components by leveraging the sensor's built-in window comparator and threshold value settings. It instantly flags defective components that leak between 0.002 l/min and 0.1 l/min, transmitting diagnostics via IO-Link or 4-20mA analogue output.

Window ComparatorHeat Transfer MethodMicro-Leak DetectionAnalogue Output (4-20 mA)10 bar Max Operating Pressure

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